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Micro/Nano-Manufacturing for Sensor/Energy/Soft Robotics

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Micro/Nano-Manufacturing for Sensor/Energy/Soft Robotics

This section covers the development and application of physical sensors that leverage advanced micro/nano-structured materials to achieve high sensitivity, flexibility, and performance. These sensors are used in various applications, including gas sensing, health monitoring, and chemical detection, and they utilize unique fabrication methods to enhance their capabilities.

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1-1. SERS Sensors based on functional micro/nano-structures

A surface-enhanced Raman scattering (SERS) sensor was developed using silver nanoparticles combined with a gold nanohole array to enhance electromagnetic fields for detecting trace molecules. This SERS sensor uses electron beam lithography to create gold nanoholes on a silicon substrate, followed by silver nanoparticle deposition through a self-assembly process. The combination of gold and silver creates localized surface plasmon resonance (LSPR), which significantly increases the sensitivity of the Raman signal for low-concentration analytes. [1]. We developed a multi-layer stacked SERS sensor, where alternating layers of metallic nanoparticles and dielectric materials create a three-dimensional architecture. The multi-layer structure enhances the electromagnetic field in the interlayer gaps, improving the SERS signal strength. The layers were fabricated using lithography and self-assembly techniques, with numerical simulations optimizing the layer thickness and nanoparticle size for maximum SERS enhancement. [2]

  • [1] Zhao, Z. J., Ahn, J., Ko, J., Jeong, Y., Bok, M., Hwang, S. H., I.Park * and Jeong, J. H.* (2020). Shape-controlled and well-arrayed heterogeneous nanostructures via melting point modulation at the nanoscale. ACS Applied Materials & Interfaces, 13(2), 3358-3368.
  • [2] Zhao, Z. J., Ahn, J., Hwang, S. H., Ko, J., Jeong, Y., Bok, M., I.Park * and Jeong, J. H.* (2021). Large-area nanogap-controlled 3D nanoarchitectures fabricated via layer-by-layer nanoimprint. Acs Nano, 15(1), 503-514.
  • Figure 1. SERS devices fabricated through micro/nano manufacturing: (1) Au nanoholes combined with Ag nanoparticles for SERS enhancement (I. Park et al., ACS Applied Materials & Interfaces, 2020), (2) multi-layered structure with line-patterned design for SERS sensing (I. Park et al., ACS Nano, 2021).

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1-2. Gas Sensors based on functional micro/nano-structures

A hybrid device combining a gas sensor with a triboelectric nanogenerator (TENG) was developed using nanoribbon structures. The gas sensor, based on semiconducting nanoribbons, shows high sensitivity to hydrogen gas. The triboelectric nanogenerator harvests mechanical energy from environmental vibrations, which powers the gas sensor. The wrinkled hierarchical structures in the TENG enhance energy harvesting efficiency. This integrated system enables self-powered operation of the gas sensor. [3] Nanoscale three-dimensional structures for gas detection was fabricated using mechanically guided assembly techniques. Pd and In₂O₃ nanostructures were suspended and bound to an elastomer substrate via covalent bonding-based nanotransfer techniques, enhancing the sensitivity to gases such as hydrogen (H₂) and nitrogen dioxide (NO₂). The gas sensor remains stable under strain and provides reliable performance for flexible applications. [4] A hydrogen gas sensor was developed using suspended platinum (Pt) nanolines, which increase the surface-to-volume ratio, improving gas sensitivity. The suspended nanolines were fabricated through KrF lithography and nanowelding, enhancing the sensor’s ability to detect hydrogen gas efficiently. This design allows for faster response times and higher sensitivity compared to conventional sensors. [5] A vertically aligned carbon nanotube (CNT)-based gas sensor was developed using atomic layer deposition (ALD). The vertically grown CNTs offer a large surface area for gas adsorption, which improves sensitivity to nitrogen dioxide (NO₂). Surface functionalization further enhances gas selectivity. The sensor is designed for environmental monitoring, providing long-term stability and reliable detection. [6]

  • [3] Ahn, J., Jeong, Y., Kang, M., Ahn, J., Padmajan Sasikala, S., Yang, I Jeong. J * and Park, I.* (2024). Nanoribbon Yarn with Versatile Inorganic Materials. Small, 2311736.
  • [4] Ahn, J., Ha, J. H., Jeong, Y., Jung, Y., Choi, J., Gu, J., Jeong. J* and Park, I.* (2023). Nanoscale three-dimensional fabrication based on mechanically guided assembly. Nature Communications, 14(1), 833.
  • [5] Zhao, Z. J., Ahn, J., Lee, D., Jeong, C. B., Kang, M., Choi, J., Park. I* and Jeong, J. H.* (2022). Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices. Nanoscale, 14(4), 1136-1143.
  • [6] Ha, J. H., Yang, I., Ahn, J., Kang, S., Zhao, Z. J., Jeong, Y.,Jeong. J* and Park, I.* (2024). Nanotransfer Printing for Synthesis of Vertically Aligned Carbon Nanotubes with Enhanced Atomic Penetration. Advanced Functional Materials, 2315028.
  • Figure 2. Gas sensors fabricated through micro/nano manufacturing: (1) Fully inorganic (MOx) nanoyarn for detecting CH4 and NH3 gas (I. Park et al., Small, 2024), (2) Printed 3D nanostructure from 2D pattern and its hydrogen gas sensing profile with Pd nano line structure (I. Park et al., Nature communications, 2023), (3) suspended Pd nano wire structure for hydrogen gas sensor (I. Park et al, Nanoscale, 2022), (4) vertically aligned growth CNTs which has high specific surface area as NO2 gas sensor (I. Park et al, Advanced Functional Materials, 2024).

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1-3. Energy Harvesters based on functional micro/nano-structures

We developed a fully inorganic energy harvester using piezoelectric nanoribbons twisted into a yarn structure, which converts mechanical deformation into electrical energy. The nanoribbons, synthesized using e-beam deposition, are assembled into a yarn, ensuring excellent durability and stability due to the absence of any organic components. The yarn structure enhances its mechanical flexibility while maintaining high energy conversion efficiency. This fully inorganic design ensures long-term performance under various environmental conditions, making it ideal for wearable electronics and other applications requiring robust energy harvesting. [7] A triboelectric nanogenerator (TENG) was designed using a wrinkled hierarchical structure to increase surface area and maximize energy harvesting from mechanical vibrations. The surface, fabricated through pre-strain release, enhances contact electrification, improving energy conversion efficiency. This device is highly flexible and suitable for wearable applications. [8] A novel color filter was developed using triboelectric nanogenerator (TENG) technology. The multi-layer structure of the TENG enables it to generate electrical signals from mechanical stimuli, which modulate the color in display applications. The device, fabricated using nanoimprinting and lamination techniques, can operate without an external power source by harvesting energy from mechanical motion. [9]

  • [7] Ahn, J., Padmajan Sasikala, S., Jeong, Y., Kim, J. G., Ha, J. H., Hwang, S. H.,Jeong. J* and Park, I.* (2024). High-Energy–Density Fiber Supercapacitors Based on Transition Metal Oxide Nanoribbon Yarns for Comprehensive Wearable Electronics. Advanced Fiber Materials, 1-15.
  • [8] Ahn, J., Zhao, Z. J., Choi, J., Jeong, Y., Hwang, S., Ko, J.,Jeong. J* and Park, I.* (2021). Morphology-controllable wrinkled hierarchical structure and its application to superhydrophobic triboelectric nanogenerator. Nano Energy, 85, 105978.
  • [9] Ahn, J., Kim, J. S., Jeong, Y., Hwang, S., Yoo, H., Jeong, Y.,Jeong. J. * and Park, I.* (2022). All‐Recyclable Triboelectric Nanogenerator for Sustainable Ocean Monitoring Systems. Advanced Energy Materials, 12(30), 2201341.
  • Figure 3. Energy harvesters using micro/nano structures (1) Inorganic nanoribbon yarn as energy harvesting systems (TENG) (I. Park et al., Advanced Fiber Materials, 2024), (2) Fabricating wrinkled micro/nano hierarchical structure and energy harvester mask operating followed by exhalation (I. Park et al., Nano energy, 2021), (3) Color-filter nano hole pattern structure as TENG device (I. Park et al, Advanced Energy Materials, 2022).

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1-4. Soft Actuators and Wearable Devices based on functional micro/nano-structures

A biomimetic, programmable, part-by-part maneuverable shape-morphing film (SMF) was developed for soft actuators, inspired by natural movement observed in organisms such as the inchworm and Drosera Capensis. The SMF uses a multilayer structure with patterned elastic modulus and differential thermal expansion, enabling programmable complex movements without manual assembly. The key innovation lies in controlling the shape morphing through embedded electrothermal heaters that allow precise part-by-part movement. This technology was demonstrated by mimicking the complex motions of a crawling inchworm and insect-gripping action of Drosera Capensis, showcasing the actuator’s potential for advanced applications in soft robotics. [10] A nanotransfer printing method using hyaluronic acid (HA) was employed to fabricate smart contact lenses. The process involves transferring ultra-thin, transparent nanomaterials onto flexible substrates to create a bio-friendly, wearable platform. This technique allows for integrating sensors and other functionalities into contact lenses, with potential applications in real-time health monitoring or augmented reality. The HA-based nanotransfer printing process is highly efficient and ensures biocompatibility, making it suitable for long-term wear. The study also demonstrated the use of this technology for optical and health monitoring applications. [11]

  • [10] Jeong, Y., Ahn, J., Ha, J. H., Ko, J., Hwang, S. H., Jeon, S., Jeong. J.* and Park, I.* (2023). Biomimetic, Programmable, and Part‐by‐Part Maneuverable Single‐Body Shape‐Morphing Film. Advanced Intelligent Systems, 5(3), 2200293.
  • [11] Ko, J., Kang, H. J., Ahn, J., Zhao, Z. J., Jeong, Y., Hwang, S. H., Jeong. J. * and Park, I.* (2021). Biocompatible nanotransfer printing based on water bridge formation in hyaluronic acid and its application to smart contact lenses. ACS Applied Materials & Interfaces, 13(29), 35069-35078.
  • Figure 4. Soft actuator and wearable device using microstructures (1) Biomimetic, programmable, and part-by-part maneuverable single-body shape morphing film (I. Park et al., Advanced Intelligent Systems, 2022), (2) Wearable Stereoscopic contact lens based on polarization-based binocular parallax: (I. Park et al., ACS Applied Materials & Interfaces, 2021).