Author

W. Wu, W. M. Tong, J. Bartman, Y. Chen, Z. Yu, D. Stewart, I. Park, C. Picciotto, J. Gao, R. Walmsley, S-Y. Wang, and R. S. Williams

Conference

Proceedings of the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN) 2007

Location

Denver, CO, USA

Period

May 2007