Design of Silicon Micro-heater based on SOI wafer for gas sensing device application(SOI 웨이퍼에 기반한 가스 센서용 실리콘 마이크로 히터 설계)
본문
- Conference
- The Korean Society of Mechanical Engineer Conference(대한기계학회 추계학술대회)
- Location
- Jeju Island
- Period
- Nov 2015
KAIST MINT LAB
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