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Fabrication of Ultra-Thin and Flexible Capacitive Type Pressure Sensor (초박형 정전 용량 기반 유연 압력 센서 제작)

본문

Author
Yongrok Jeong, Jaeho Park, Kyuyoung Kim and Inkyu Park
Conference
KMEMS 2017
Location
Jeju
Period
Mar 2017